Spectroscopic Ellipsometer

Model Number

Rubbins-1000

Rubbing Inspection

- 1-D (& 2-D) rubbing strength distribution can be mapped for whole LCD panel.

- Deviation by measurement positions is less than 10% → Quick sample is possible.

- Signal difference among different rubbing condition is distinctive.

- Underlying important part and/or defect can also be distinctively measured.

- In-line or off-line measurement

- Thickness, refractive index {n, k} and uniformity measurement of any thin film layer including polyimide layer. (optional)

Mapping Stage (whole glass for any generation)

- Travel: 2280 mm × 1920 mm for 7-G

- Max.speed: 0.5 m/s

- Clean room quality

- Vacuum chuck and booth

• Rubbing Inspection for LCD

• Rubbing Strength Measurement for Process Control

• Optical Axis Measurement in LC Alignment Layer

• Whole Glass without Rotation, Off- & In-Line System